Temperature sensing solution for metalorganic chemical vapor deposition (GaN-based epitaxy) with true wafer surface temperature and reflectance instrumentation improves efficiency and yield in LED industry

LumaSense Releases New Pyrometry System for MOCVD Processes in LED Production

LumaSenseInc.com: New Pyrometry System for MOCVD Processes in LED Production

LumaSense Technologies, Inc. released the UV 400 and UVR 400 pyrometers, the newest generation of non-contact temperature measurement instrumentation for metalorganic chemical vapor deposition (MOCVD) processes in the rapidly growing LED industry ( http://www.lumasenseinc.com/EN/products/infrared-thermometers-and-switches/specials/pyrometer-uv-400-and-uvr-400.html ). The UV 400 and UVR 400 are in a unique position to help manufacturers using MOCVD improve efficiency and reduce waste in their LED manufacturing process.

Using a center wavelength in the UV spectrum (400 nm) these pyrometers make it possible to measure real wafer surface temperature, while traditional pyrometers are only able to measure the susceptor/pocket temperature under the wafer. This allows the most accurate and repeatable control of the wafer temperature which e. g. in LED production is critical to the final product wavelength and manufacturing yields. The wide temperature range of 650 to 1300

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